A novel PDMS/Parylene microvalve with three dimentional dome petal shape

Author

Jonghyun Oh ; Gyuman Kim ; Hongseok Noh

Author_Institution

Mech. Eng. & Mech., Drexel Univ., Philadelphia, PA, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

1075

Lastpage

1078

Abstract

We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as dome-shaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.

Keywords

bioMEMS; biomedical materials; composite materials; diseases; laser beam machining; microfabrication; microfluidics; micromachining; microvalves; patient treatment; polymers; 3-D dome petal shape; PDMS-parylene composite layer; SU-8 mold fabrication; flow rate characteristic; hydrocephalus; in-vitro flow tests; laser machining; microfabrication; microvalve; pathological condition; three dimentional dome petal shape; Abdomen; Biomembranes; Diseases; Geometry; Immune system; Mechanical engineering; Microvalves; Shape; Testing; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442396

Filename

5442396