A novel approach for the fabrication of all-polymer microfluidic devices

This paper describes a process sequence for the fabrication of all-polymer microfluidic chips based on the multilayer lamination of TMMF dry resist (TOK, Japan) on a pre-patterned PMMA substrate. The sequence provides a simple way to meet major microfluidic requirements like the fabrication of embedded microchannels, nozzles and interconnecting vias as well as their accurate integration into a chip-interface without additional materials and bonding procedures. We demonstrate the applicability of the sequence by manufacturing and testing a 24-channel TopSpot printhead. Additionally, non-cytotoxicity of TMMF was confirmed in cell culture experiments and different methods for surface modification were investigated.