Modeling, fabrication and characterization of a high-performance micropump

In this paper, the design and fabrication of a multi-material high-performance micropump is presented. Exceptional flow rates of 90 ml/min were achieved by appropriate design optimization. Manufacturing steps such as laser welding and hot embossing were successfully realized and provide a robust and scalable production technique for the micropump. Characterization of the pump demonstrated high repeatability of the air flow rate as well as long life. Analytical modeling successfully predicts the behaviour of the pump with regard to inertial effects.