DocumentCode :
2010979
Title :
Measurement of elastic tension of Parylene films deposited on liquid
Author :
Binh-Khiem, Nguyen ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fYear :
2010
fDate :
24-28 Jan. 2010
Firstpage :
556
Lastpage :
559
Abstract :
Parylene films deposited on liquid surface induce film tension that changes the liquid shape. We observed that the force acting on the surface of Parylene-C encapsulated liquid bodies increased continuously during Parylene deposition process and reached final values of magnitude more than 700 ¿N/mm for a 1 ¿m thick film, 20 times larger than the surface tension of the encapsulated liquid. This surface force can only be attributed to the tension of the Parylene films. This founding requires that in design of Parylene encapsulated liquid structures, Parylene film tension must be considered as the main factor that determines the structures´ final shape.
Keywords :
chemical vapour deposition; elasticity; liquid structure; polymers; thick films; Parylene deposition process; elastic tension; encapsulated liquid structures; liquid surface; parylene films; surface tension; Coatings; Crystallization; Equations; Gravity; Micromechanical devices; Polymers; Semiconductor films; Shape measurement; Surface tension; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
ISSN :
1084-6999
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2010.5442443
Filename :
5442443
Link To Document :
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