DocumentCode
2011020
Title
A Thin-Base Lateral Bipolar Transistor Fabricated on Bonded SOI
Author
Higaki, N. ; Fukano, T. ; Fukuroda, A. ; Sugii, T. ; Arimoto, Y. ; Ito, T.
Author_Institution
Fujitsu Laboratories Ltd., Japan
fYear
1991
fDate
28-30 May 1991
Firstpage
53
Lastpage
54
Keywords
Bipolar transistors; Bonding; Boron; Cutoff frequency; Fabrication; Indium tin oxide; Laboratories; MOS devices; Parasitic capacitance; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705986
Filename
705986
Link To Document