Queueing Generalized Stochastic Colored Timed Petri Nets-based Approach to Modeling for Semiconductor Wafer Fabrication

Some of the important characteristics of the semiconductor wafer fabrication factories are re-entrant process flows, a dynamic and uncertain environment, resource sharing, unpredicted machine breakdown, etc. So, the design, implementation, and operation of manufacturing systems is a complex task. Without powerful modeling techniques it is practically impossible to efficiently design a manufacturing system. Modeling the system is a premise work to optimize the properties of the system. In this paper, a modeling approach based on queueing generalized stochastic colored timed Petri-net (QGSCTPN) for semiconductor wafer fabrication is presented. The main idea of this tool is to combine colored timed Petri nets with the queuing systems, and it aims to make simulation over the model more efficient. It also can be used to model various detail of manufacturing system such as re-entrant processing, machine failures, loading and unloading, etc., pertaining to wafer fabrication. Using the industrial example as a case study, this paper aims at presenting some theoretical methods and their application using a modeling tool during the design of manufacturing systems. Finally, the aim of next-step work is put-forward.