Title :
Oxygen radical density measurement in O/sub 2/-N/sub 2/ gas mixture plasmaby means of a platinum made thin wire sensor
Author :
Haraki, N. ; Ono, Shintaro ; Ten, Sergey
Author_Institution :
Musashi Inststute of Technol., Tokyo, Japan
Abstract :
Summary form only given, as follows. The oxygen radical density measurement using thin platinum wire has been described. Using thin tungsten wire for the measurement of local gas temperature, more precise oxygen radical density measurement has been tried. However there is no significant influence on the oxygen radical density measurement at this experimental condition. Even if the radical density is derived, a big error does not contain it without the correction of gas temperature from the platinum wire temperature in our experimental condition.
Keywords :
gas mixtures; nitrogen; oxygen; plasma chemistry; plasma density; plasma diagnostics; plasma temperature; N/sub 2/; O/sub 2/; O/sub 2/-N/sub 2/; gas mixture plasma; oxygen radical density measurement; plasma gas temperature; platinum thin wire sensor; recombination energy supply; red heat phenomenon; Density measurement; Gas detectors; Oxygen; Plasma density; Plasma measurements; Plasma temperature; Platinum; Sensor phenomena and characterization; Temperature sensors; Wire;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228592
