DocumentCode
2011227
Title
Study of dielectric barrier discharge under atmospheric condition
Author
Peng, Y.C. ; Zhou, Y.X. ; Wang, Jiacheng ; Shu, Lei ; Yan, Pei-guang ; Sun, G.S. ; Zhang, S.C.
Author_Institution
Inst. of Electr. Eng., Acad. Sinica, Beijing, China
fYear
2003
fDate
5-5 June 2003
Firstpage
154
Abstract
Summary form only given, as follows. The dielectric barrier discharge (DBD) possesses potential advantages in surface processing and plasma chemistry under atmospheric condition. The most common case of DBD shows a filamentary form between electrodes. To obtain a homogeneous i.e. non-filamentary DBD, so called atmospheric pressure glow discharge (APGD), is the point of special interest in achieving better results of surface treatment. In this paper, in order to obtain the homogeneous form investigation on DBD is carried out with different voltages, frequencies and dielectrics. Optical properties and power consumption measurements were made in different gas mixtures with and without the presence of gas flow through the discharge chamber.
Keywords
gas mixtures; glow discharges; plasma chemistry; plasma materials processing; atmospheric condition; atmospheric pressure glow discharge; dielectric barrier discharge; filamentary form; gas mixtures; homogeneous discharge; optical properties; plasma chemistry; power consumption; surface processing; Atmospheric measurements; Dielectrics; Electrodes; Energy consumption; Frequency; Glow discharges; Plasma chemistry; Surface discharges; Surface treatment; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1228593
Filename
1228593
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