Electrical characteristics of a 13.56 MHz glow discharge generated in atmospheric helium

Summary form only given, as follows. Nonthermal atmospheric glow gas discharges are particularly attractive for many industrial and medical applications, largely because they do not need the usually indispensable vacuum system. While this significant advantage has been demonstrated in numerous materials processing applications, fundamental studies into their basic properties are comparably few. To deduce the generator systems, it is important to perform appropriate designed experiments. This contribution reports the results of a results of a recent atmospheric helium discharge experiment using a 13.56 MHz power generator system.