Title :
Selective-Polysilicon Emitter, Self-Aligned Bipolar Structure for BiCMOS VLSI Applications
Author :
Shih Wei Sun ; Denning, D. ; Hayden, J. ; Woo, M. ; Fitch, J.
Author_Institution :
Motorola Inc., Advanced Products Research and Development Laboratory, Texas
Keywords :
BiCMOS integrated circuits; CMOS process; Etching; Hafnium; Implants; Rapid thermal annealing; Silicon; Substrates; Sun; Very large scale integration;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.705987
