Carbon nanotube self-assembeled high frequency resonator

We present a single wall carbon nanotube (SWCNT) based high frequency resonator fabricated using a novel process suitable for mass fabrication. The integration of the electrostatically actuated SWCNT into the silicon structure was achieved by a specially tailored fabrication process which is characterized by simplicity and compatibility with commonly used micro-machining processes. The fabrication process enables the control of the SWCNT positioning and its length and results in a taut and clean suspended SWCNT. Electro-mechanical testing of these devices demonstrates a resonance frequency of 13.4 MHz. Resonators with various resonance frequencies can be readily fabricated by varying the SWCNT length.