Title :
Polycarbosilane-derived silicon carbide MEMS component fabricated by slip casting with SU8 micro mold
Author :
Ishikawa, T. ; Namazu, T. ; Yoshiki, K. ; Inoue, S. ; Hasegawa, Y.
Author_Institution :
Univ. of Hyogo, Japan
Abstract :
In this paper, we describe a new production method for microscale silicon carbide (SiC) ceramics parts. Slip casting with SU8 micro mold was carried out for the fabrication of a three-dimensional SiC MEMS component, which was made from polycarbosilane (PCS) precursor-derived SiC nano powder. SiC nano powder was mixed with a PCS solution. The slips were then cast into SU8 micro mold made on porous tungsten carbide (WC) plate. Firing at 1273 K was conducted for SU8 evaporation and PCS pyrolysis. We have succeeded in producing microscale SiC ceramics gears using the ¿¿ slip casting¿ technique.
Keywords :
casting; ceramic products; ceramics; micromechanical devices; moulding; nanoparticles; pyrolysis; silicon compounds; wide band gap semiconductors; 3D SiC MEMS component; PCS pyrolysis; SU8 evaporation; SU8 micromold; SiC; SiC ceramics parts; microscale SiC ceramics gears; microscale silicon carbide; polycarbosilane precursor-derived SiC nano powder; polycarbosilane-derived silicon carbide MEMS component; porous tungsten carbide plate; ¿ slip casting; Casting; Ceramics; Fabrication; Micromechanical devices; Optical wavelength conversion; Personal communication networks; Powders; Production; Silicon carbide; Tungsten;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442476
