Infiltration-processed, functionally graded materials for microceramic componenets

Author

Hassanin, H. ; Jiang, K.

Author_Institution

Sch. of Mech. Eng., Univ. of Birmingham, Birmingham, UK

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

368

Lastpage

371

Abstract

A three-dimensional micro ceramic functionally graded material (FGM) has been fabricated by an infiltration process. The proposed technique offers an effective way to tailor the composition and microstructure of ceramic micro components. The process involves soft lithography, colloidal powder processing and the infiltration of yttria stabilized zirconia with a pre-ceramic polymer solution. Analyses by SEM, BSE and EDS have revealed the existence of concentration gradients, the Si and C content decreasing with increasing of the sample depth. The resultant micro part has a homogeneous core encased with a graded and layer of YSZ / SiC.

Keywords

X-ray chemical analysis; ceramics; colloids; electron backscattering; functionally graded materials; melt infiltration; powders; scanning electron microscopy; silicon compounds; soft lithography; SEM; YO₃ZrO₃-SiC; colloidal powder processing; concentration gradients; electron backscattering; energy dispersive X-ray spectroscopy; functionally graded materials; infiltration process; microceramic componenets; microstructure; pre-ceramic polymer solution; scanning electron microscopy; soft lithography; yttria stabilized zirconia; Biological materials; Ceramics; Composite materials; Fabrication; Microstructure; Polymers; Scanning electron microscopy; Silicon carbide; Temperature; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442488

Filename

5442488