Title :
Enhanced Reliability of Native Oxide Free Capacitor Dielectrics on Rapid Thermal Nitrided Polysilicon
Author :
Ajika, N. ; Ohi, M. ; Arima, H. ; Matsukawa, T. ; Tsubouchi, N.
Author_Institution :
LSI Research and Development Laboratory, Mitsubishi Electric Corp., Japan
Keywords :
Capacitors; Dielectrics; Electrodes; Large scale integration; Lead compounds; Leakage current; Silicon compounds; Stress; Substrates; Temperature dependence;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.705991
