DocumentCode
2012157
Title
Enhanced Reliability of Native Oxide Free Capacitor Dielectrics on Rapid Thermal Nitrided Polysilicon
Author
Ajika, N. ; Ohi, M. ; Arima, H. ; Matsukawa, T. ; Tsubouchi, N.
Author_Institution
LSI Research and Development Laboratory, Mitsubishi Electric Corp., Japan
fYear
1991
fDate
28-30 May 1991
Firstpage
63
Lastpage
64
Keywords
Capacitors; Dielectrics; Electrodes; Large scale integration; Lead compounds; Leakage current; Silicon compounds; Stress; Substrates; Temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705991
Filename
705991
Link To Document