Title :
Comprehensive characterizations of contact, bulk and total resistance of strain-sensitive nanocomposite elastomer
Author :
Hu, Huan ; Zhao, Shenshen ; Liu, Chang
Author_Institution :
Northwestern Univ., Evanston, IL, USA
Abstract :
Strain-sensitive, conductive nanocomposite elastomer is an emerging MEMS material. Here, we present comprehensive characterization of contact resistance between nanocomposite elastomers and metal electrodes for different contact areas, applied forces, and contact metals. Further, we report new findings regarding the strain dependence of bulk resistance. These lead to important guidelines for designing generic elastomeric force-sensing devices.
Keywords :
elastomers; mechanical contact; micromechanical devices; nanocomposites; MEMS material; applied forces; bulk characterization; bulk resistance; conductive nanocomposite elastomer; contact characterization; contact metals; contact resistance; elastomeric force-sensing devices; metal electrodes; strain dependence; strain-sensitive nanocomposite elastomer; total resistance characterization; Carbon nanotubes; Conducting materials; Contact resistance; Electrical resistance measurement; Electrodes; Force sensors; Guidelines; Kelvin; Micromechanical devices; Stress;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442523
