A New Approach Based on a Least Square Method for Real-Time Estimation of Cantilever Array Deflections with an FPGA

Author

Couturier, Raphaël ; Domas, Stéphane ; Goavec-Merou, Gwenhael ; Favre, M. ; Lenczner, M. ; Meister, André

Author_Institution

FEMTO-ST, Univ. of Franche-Comte, Belfort, France

fYear

2012

fDate

2-3 April 2012

Firstpage

30

Lastpage

37

Abstract

Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus our attention on an inter ferometry method for deflection estimation of cantilever arrays in quasi-static regime. In its original form, spline interpolation was used to determine interference fringe phase, and thus the deflections. Computations were performed on a PC. Here, we propose a new complete solution with a least square based algorithm and an optimized FPGA implementation. Simulations and real tests showed very good results and open perspective for real-time estimation and control of cantilever arrays in the dynamic regime.

Keywords

atomic force microscopy; cantilevers; field programmable gate arrays; interferometry; least squares approximations; splines (mathematics); AFM; atomic force microscopes; cantilever array deflections; deflection estimation; high resolution images; inter ferometry method; least square method; optimized FPGA implementation; real-time estimation; spline interpolation; Arrays; Cameras; Field programmable gate arrays; Laser beams; Optical interferometry; Real time systems; Spline; FPGA; cantilever arrays; interferometry;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Control and Software Implementation for Distributed MEMS (dMEMS), 2012 Second Workshop on

Conference_Location

Besancon

Print_ISBN

978-1-4673-1203-5

Type

conf

DOI

10.1109/dMEMS.2012.16

Filename

6195431