Title :
A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers
Author :
Chen, Wen-Chien ; Chen, Che-Sheng ; Wen, Kuei-Ann ; Fan, Long-Sheng ; Fang, Weileun ; Li, Sheng-Shian
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500 kHz to 14.5 MHz, have been realized with resonator Q´s around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
Keywords :
CMOS integrated circuits; amplifiers; micromechanical resonators; IC fabrication technology; amplifier circuits; capacitively-transduced resonators; design flexibilities; frequency 500 kHz to 14.5 MHz; generalized foundry CMOS-MEMS platform; integrated micromechanical resonator circuits; mechanical boundary conditions; structural materials; transduction area; Application specific integrated circuits; Boundary conditions; Fabrication; Flexible printed circuits; Foundries; Frequency; Integrated circuit technology; Mechanical sensors; Micromechanical devices; Radiofrequency integrated circuits;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442531
