Modeling, Filtering and Optimization for AFM Arrays

In this paper, we present new tools and results developed for Arrays of Microsystems and especially for Atomic Force Microscope (AFM) array design. For modeling, we developed a two-scale model of cantilever arrays in elasto dynamics. A robust optimization toolbox is interfaced to aid for design before the micro fabrication process. A model based algorithm of static state estimation using measurement of mechanical displacements by inter ferometry is stated. Quantization of inter ferometry data processing is analyzed for FPGA implementation. A robust H_∞ filtering problem of the coupled cantilevers is solved for time invariant system with random noise effects. Our solution allows semi-decentralized computing based on functional calculus that can be implemented by networks of distributed electronic circuits as shown in a previous paper.