Title :
A Piezoelectric Flow Sensor for Wake-Up Switch of Wireless Sensor Network Node
Author :
Tomimatsu, Y. ; Kuwana, K. ; Kobayashi, T. ; Itoh, T. ; Maeda, R.
Author_Institution :
NMEMS Technol. Res. Organ., Yasu, Japan
Abstract :
Power management technology is a fundamental issue in wireless sensor network. In this paper, we propose a concept of a piezoelectric flow sensor for a wake-up switch of a wireless sensor node to reduce the power consumption. The sensor detects air flow change surrounding the wireless sensor node by using a cantilever with Pb(Zr, Ti)O3 (PZT) thin film. We fabricated a prototype of the flow sensor and measured the relationship between the flow velocity change and the piezoelectric voltage of the cantilever. The sensor responded when the flow velocity changed. The output voltage increases with the increase of the flow velocity change.
Keywords :
cantilevers; flow sensors; microswitches; piezoelectric thin films; power consumption; wireless LAN; wireless sensor networks; PZT thin film; air flow change detection; cantilever; flow velocity change measurement; piezoelectric flow sensor; piezoelectric voltage; power management technology; wake up switch; wireless sensor network node; Electrodes; Micromechanical devices; Silicon; Switches; Voltage measurement; Wireless communication; Wireless sensor networks; Reduction of power consumption; Sensor node; Switch; Wireless sensor network; piezoelectric;
Conference_Titel :
Design, Control and Software Implementation for Distributed MEMS (dMEMS), 2012 Second Workshop on
Conference_Location :
Besancon
Print_ISBN :
978-1-4673-1203-5
DOI :
10.1109/dMEMS.2012.10
