Title :
A 3MHz spoke gyroscope with wide bandwidth and large dynamic range
Author :
Sung, Wang-kyung ; Dalal, Milap ; Ayazi, Farrokh
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper reports on the design and characterization of a high-frequency silicon bulk acoustic wave (BAW) spoke gyroscope operating in air. The gyroscope described here operates at 3.12 MHz in a near mode-matched condition (without tuning) and has a -1 dB bandwidth of ~1.5 kHz. The device has a linear full-scale range in excess of 30,000°/sec with a sensitivity of 15.0 ¿V/°/sec using a 10 V DC polarization voltage. The wide bandwidth and large dynamic range of this device are beneficial for applications requiring rapid motion sensing.
Keywords :
bulk acoustic wave devices; gyroscopes; frequency 3 MHz; frequency 3.12 MHz; high-frequency silicon bulk acoustic wave spoke gyroscope; near mode-matched condition; voltage 10 V; Bandwidth; Dynamic range; Electrodes; Fabrication; Frequency; Gyroscopes; Polarization; Resonance; Silicon; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442554
