Title : 
Beam energy enhancement studies in a plasma sputter-type negative ion source
         
        
            Author : 
Yarnbot, M.L. ; Ubarro, A.O. ; Ramos, H.J.
         
        
        
        
        
            Abstract : 
Summary form only given, as follows. A one-liter volume plasma sputter-type negative ion source is used for the production of metal ions like Zr/sup -/ and ions like O/sup -/ and H/sup -/ depending on the target material and gas. The energies of these ions have been obtained in the range of a few hundred eV using a retarding potential-type electrostatic energy analyzer. In this work, the range of energies is enhanced to the keV range by proper focusing and acceleration schemes of the self-extracted ions. Ion beam characterization include measurements of beam energy, ion current density, perveance and emittance. The results for cesiated and uncesiated targets are discussed.
         
        
            Keywords : 
ion sources; Cs; H; O; Zr; beam energy; cesiated targets; emittance; ion current density; perveance; plasma sputter-type negative ion source; uncesiated targets; Acceleration; Electrostatic analysis; Inorganic materials; Ion beams; Ion sources; Particle beams; Plasma materials processing; Plasma sources; Production; Zirconium;
         
        
        
        
            Conference_Titel : 
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
         
        
            Conference_Location : 
Jeju, South Korea
         
        
        
            Print_ISBN : 
0-7803-7911-X
         
        
        
            DOI : 
10.1109/PLASMA.2003.1228697