Single-material MEMS using polycrystalline diamond

Author

Cao, Zongliang ; Varney, Mike ; Aslam, Dean

Author_Institution

Micro & Nano Technol. Lab., Michigan State Univ., East Lansing, MI, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

51

Lastpage

54

Abstract

The multi-material MEMS fabrication process often requires a larger number of masks making it more expensive as compared to single-material MEMS (SMM) technology. By varying the doping level in poly-C, semi-conducting, metallic and insulating (undoped) properties are achieved that are needed for poly-C SMM. However, the development of diamond-based SMM technology faces a number of challenges including (a) producing highly-insulating and highly-conducting poly-C films, (b) creating ohmic contacts and (c) patterning by dry etching of poly-C films grown on Si or SiO₂. These challenges are addressed in this paper.

Keywords

diamond; etching; masks; microfabrication; diamond-based SMM technology; dry etching; insulating properties; masks; metallic properties; multimaterial MEMS fabrication; ohmic contacts; poly-C films; poly-C properties; polycrystalline diamond; semiconducting properties; single-material MEMS technology; undoped properties; Boron; Conductivity; Fabrication; Hydrogen; Insulation; Micromechanical devices; Ohmic contacts; Probes; Semiconductor device doping; Semiconductor films;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442569

Filename

5442569