DocumentCode
2013853
Title
[Copyright notice]
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
1
Lastpage
1
Abstract
The following topics are dealt with: MEMS fabrication; nanomaterials; nanodevices; electronics packaging; physical sensors; RF MEMS resonators; optical MEMS; biosensors; chemical sensors; medical sensors; microfluidic components; actuators; power MEMS; energy harvesting.
Keywords
biomedical equipment; biosensors; chemical sensors; electronics packaging; energy harvesting; microactuators; microfabrication; microfluidics; micromechanical resonators; nanoelectronics; MEMS fabrication; RF MEMS resonators; biosensors; chemical sensors; electronics packaging; energy harvesting; medical sensors; microfluidic components; nanodevices; nanomaterials; optical MEMS; physical sensors; power MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442580
Filename
5442580
Link To Document