Title :
Mode analysis and self ducting of high power microwaves in preformed density channels
Author :
Rajyaguru, C. ; Ito, H. ; Yugami, Noboru ; Nishida, Yoshiharu
Author_Institution :
Graduate Sch. of Eng., Utsunomiya Univ., Japan
Abstract :
Summary form only given, as follows. Planar surface wave plasma (SWP) has been expected to be one of the next generation plasma sources for the processing and extensively studied. The questions why the efficiency of the energy absorption in SWP is so good and as the results high density plasma is sustained, are still not clear.
Keywords :
plasma instability; plasma radiofrequency heating; plasma sources; plasma waves; energy absorption; high density plasma; high power microwaves; mode analysis; next generation plasma sources; planar surface wave plasma; preformed density channels; self ducting; Dielectrics; Glass; Indium tin oxide; Microwave propagation; Plasma density; Power engineering and energy; Refractive index; Strips; Surface waves; Waveguide theory;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228744
