Title :
Features of micron-sized mesa-piezoresistor
Author :
Gridchin, Victor A. ; Chebanov, Michail A.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
fDate :
June 30 2010-July 4 2010
Abstract :
The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated.
Keywords :
finite element analysis; piezoresistive devices; resistors; contact pads; dihedral angle; finite element method; junction region; micron sized mesa piezoresistor; tensoresistive layer; Silicon; Strain; Finite element method; mechanical stress concentrator; mesa-piezoresistor; pressure sensor;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-6626-9
DOI :
10.1109/EDM.2010.5568638
