DocumentCode
2014539
Title
Photodetection with silicon pyramidal microdischarge devices
Author
Ostrom, Nels P. ; Eden, J. Gary
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Volume
1
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
154
Abstract
The performance of Si microdischarge photodetectors has been characterized in detail in the visible and near-infrared with near-atmospheric Ne plasmas. This new hybrid semiconductor/plasma detector offers the potential for integration with other Si-based optoelectronic devices.
Keywords
discharges (electric); elemental semiconductors; infrared detectors; integrated optoelectronics; photodetectors; silicon; Ne; Si; Si photodetectors; Si-based optoelectronic devices; hybrid semiconductor/plasma detector; microdischarge photodetectors; near-atmospheric Ne plasmas; near-infrared spectra; photodetection; pyramidal microdischarge devices; silicon microdischarge devices; visible spectra; Cathodes; Detectors; Microcavities; Optical devices; Optical films; Optical filters; Optical saturation; Optical sensors; Plasma applications; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363157
Filename
1363157
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