A micromachined vibrating gyroscope

Author

Tanaka, Kiyoshi ; Mochida, Y. ; Sugimoto, Satoshi ; Moriya, K. ; Hasegawa, T. ; Atsuchi, K. ; Ohwada, Kazunari

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

278

Keywords

Capacitance; Electrodes; Electrostatics; Gyroscopes; Micromachining; Optical resonators; Q factor; Resonant frequency; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472534

Filename

472534

Link To Document