DocumentCode
2015108
Title
Fabrication of giant magnetostrictive thin film actuators
Author
Quandt, E. ; Seemann, E.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
273
Keywords
Actuators; Amorphous magnetic materials; Fabrication; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetostriction; Perpendicular magnetic anisotropy; Sputtering; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472535
Filename
472535
Link To Document