Title :
Hot carrier induced degradation in deep submicron MOSFETs at 100°C
Author :
Li, E. ; Rosenbaum, E. ; Register, L.F. ; Tao, J. ; Fang, P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
This work demonstrates that Vg=Vd is the worst case stress condition for deep submicron NMOSFETs and PMOSFETs operating at 100°C. Degradation is more severe at 100°C than at room temperature even for supply voltages greater than 2.5 V. The effect of channel length on the substrate current´s temperature-dependence is also examined
Keywords :
MOS integrated circuits; MOSFET; hot carriers; integrated circuit reliability; PMOSFET; channel length; deep submicron MOSFETs; hot carrier induced degradation; substrate current; temperature-dependence; Degradation; Hot carriers; MOSFETs; Registers; Space technology; Stress measurement; Temperature dependence; Temperature measurement; Testing; Voltage;
Conference_Titel :
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-5860-0
DOI :
10.1109/RELPHY.2000.843898