DocumentCode
2015609
Title
Piezoelectric lead-zirconate-titanate actuator films for microelectromechanical systems applications
Author
Mescher, M. ; Abe, Takeshi ; Brunett, Bruce ; Metla, Hasan ; Schlesinger, T.E. ; Reed, Michael
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
261
Keywords
Gallium arsenide; Laser tuning; Lead compounds; Microelectromechanical systems; Optical films; Piezoelectric actuators; Piezoelectric films; Semiconductor films; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472537
Filename
472537
Link To Document