Title :
Nontactile reliability testing of a micro optical attenuator
Author :
Rembe, Christian ; Aschemann, Harald ; Wiesche, Stefan Aus der ; Hofer, Eberhard P. ; Debeda, Helen ; Mohr, Juergen ; Wallrabe, Ulrike
Author_Institution :
Dept. of Meas., Control & Microtechnol., Ulm Univ., Germany
Abstract :
The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS)
Keywords :
micro-optics; microactuators; optical fibres; semiconductor device reliability; MEMS; dynamic processes; high-speed cine photomicrography; light propagation; micro optical attenuator; micro opto electro mechanical switch; nontactile reliability testing; optical fibers; Image sequences; Mechanical systems; Optical attenuators; Optical fibers; Optical propagation; Optical switches; Photomicrography; Power system modeling; Power system reliability; System testing;
Conference_Titel :
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-5860-0
DOI :
10.1109/RELPHY.2000.843902
