Title :
Large scale arrays of microdischarge devices fabricated in Si
Author :
Park, Sung-Jin ; Chen, Kuo-Feng ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
In this paper, the design and performance of novel AC type silicon microdischarge devices and arrays. We have fabricated, by MEMS and VLSI fabrication processes, microdischarge devices having cavity widths in the 10 -100 μm range and incorporating a metal/dielectrics/Si structure.
Keywords :
VLSI; elemental semiconductors; glow discharges; metal-insulator boundaries; micro-optics; microcavities; micromechanical devices; optical arrays; optical fabrication; plasma devices; silicon; 10 to 100 mum; AC type silicon microdischarge device arrays; MEMS; Si; VLSI; metal/dielectrics/Si structure; Dielectric devices; Electrodes; Large-scale systems; Optical arrays; Optical devices; Optical saturation; Plasma applications; Plasma devices; Silicon; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363208
