DocumentCode
2015984
Title
3D Lithography, Etching, and Deposition Simulation (Sample-3D)
Author
Scheckler, E.W. ; Toh, K.K.H. ; Hoffstetter, D.M. ; Neureuther, A.R.
Author_Institution
Electronics Research Laboratory, University of California
fYear
1991
fDate
28-30 May 1991
Firstpage
97
Lastpage
98
Keywords
Circuit simulation; Computational efficiency; Computational modeling; Etching; Lithography; Optical surface waves; Resists; Semiconductor device modeling; Surface topography; Topology;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.706008
Filename
706008
Link To Document