DocumentCode
2016171
Title
Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor
Author
Enoksson, Peter ; Stemme, Goran ; Stemme, Erik
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
133
Keywords
Biomedical measurements; Density measurement; Fuels; Mechanical sensors; Micromachining; Resonance; Resonant frequency; Sensor systems; Silicon; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472540
Filename
472540
Link To Document