Title :
Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor
Author :
Enoksson, Peter ; Stemme, Goran ; Stemme, Erik
fDate :
29 Jan-2 Feb 1995
Keywords :
Biomedical measurements; Density measurement; Fuels; Mechanical sensors; Micromachining; Resonance; Resonant frequency; Sensor systems; Silicon; Vibration measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472540
