DocumentCode

2016498

Title

Simultaneous Deposition and Fusion-Flow Planarization of Bpsg

Author

Hartman, J. ; McKinley, K. ; Helms, A. ; Logan, M. ; Kern, W. ; Inudo, Y.

Author_Institution

Sumitomo Metals Industries, Ltd., Japan

fYear

1991

fDate

28-30 May 1991

Firstpage

101

Lastpage

102

Keywords

Annealing; Chemical vapor deposition; Filling; Furnaces; Glass; Inductors; Nitrogen; Planarization; Substrates; Temperature distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

conf

DOI

10.1109/VLSIT.1991.706010

Filename

706010