DocumentCode

2016524

Title

An electrochemical micro actuator

Author

Hamberg, M.W. ; Neagu, C. ; Gardeniers, J.G.E. ; Ijntema, D.J. ; Elwenspoek, M.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

106

Keywords

Actuators; Biomembranes; Circuits; Copper; Electrochemical processes; Electrodes; Microactuators; Platinum; Production; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472545

Filename

472545