Title :
An electrochemical micro actuator
Author :
Hamberg, M.W. ; Neagu, C. ; Gardeniers, J.G.E. ; Ijntema, D.J. ; Elwenspoek, M.
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Biomembranes; Circuits; Copper; Electrochemical processes; Electrodes; Microactuators; Platinum; Production; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472545
