Dynamic Response of a Microbeam-Supported Microplate under Interfacial Microwave Load

An analytical model has been developed to understand the rotational dynamics of a microbeam-supported rigid microplate, which is positioned across a microchannel partially filled with an isotropic liquid. Physical phenomena included in this work are those associated with surface tension, buoyancy, hydrodynamics, interfacial microwaves, and torsional stiffness of the microbeam supports. Consideration of surface tension results in nonlinear terms for the righting moment and for the forcing function terms of the ordinary differential equation of rotational motion. Response characteristics are investigated for varying microwave amplitudes and frequencies, as well as microplate and microbeam principal dimensions. Results show that the analysis presented in this work can be used in designing microdevices for measurement of fluid properties, microwave features and pulsating pressures.