Effect of plasma pretreatment of soda-lime glass on the preferred orientation of TiO/sub 2/ prepared by PECVD

Summary form only given, as follows. TiO/sub 2/ has environmental application due to its unique photoinduced properties such as antibacterial and superhydrophilic functions. It is reported that crystalline structure and orientation of TiO/sub 2/ thin film affect photocatalytic efficiency. And our previous study showed that <112>-preferred orientation TiO/sub 2/ film resulted in the better photocatalytic efficiency. <112>-oriented TiO/sub 2/ thin films were fabricated on soda-lime glass substrate using PECVD methods. This study was the effort to find the correlation between pretreatment with plasma and <112>-preferred orientation of TiO/sub 2/ thin films. The PECVD methods were used at the relatively low substrate temperature of the range from 250/spl deg/ to 412/spl deg/ in order to avoid Na/sup +/ diffusion from the soda-lime glass substrate into TiO/sub 2/ layer during deposition.