DocumentCode

2017132

Title

Effective methods to prevent stiction during post-release-etch processing

Author

Abe, Takeshi ; Messner, William C. ; Reed, Michael L.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

94

Keywords

Etching; Fabrication; Laboratories; Laplace equations; Liquids; Micromachining; Microstructure; Shape; Surface tension; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472547

Filename

472547