Title :
Electrical OverStress/ElectroStatic Discharges (EOS/ESD) Specificities in MEMS: Outline of a Protection Strategy
Author :
Caillard, B. ; Pellet, C. ; Touboul, Antoine ; Mita, Y. ; Fujita, Hideaki
Author_Institution :
Univ. of Bordeaux, Bordeaux
Abstract :
In this paper, increased EOS/ESD concerns related to MEMS structural specificities are indexed and general works about failures and reliability improvement in MEMS are reviewed from an EOS/ESD point of view, as well as existing protection methods. Then a new method is proposed and recommandations for a general scheme for MEMS protection are suggested.
Keywords :
electrostatic discharge; micromechanical devices; semiconductor device reliability; MEMS; electrical electrostatic discharges; electrical overstress discharges; failures improvement; protection strategy; reliability improvement; Capacitance; Earth Observing System; Electrostatic discharge; Etching; Fabrication; Failure analysis; Microactuators; Micromechanical devices; Protection; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-1014-9
DOI :
10.1109/IPFA.2007.4378067
