Title :
Analytical Modeling and Quantitative Analysis of Scratch Drive Actuator
Author :
Zu, Jean W. ; Qu, Qiuzhen ; Cheng, Gong
Author_Institution :
University of Toronto
Abstract :
A new analytical model of Scratch Drive Actuator (SDA) is proposed, which considers its deforming states and geometry characteristics. This model contains three kinds of conditions: low driving voltage, critical driving voltage and high driving voltage. The storing strain energy in the SDA is studied under different conditions because the working performance of the SDA mainly depends on it. Analysis results demonstrate that it is necessary to choose appropriate design parameters of the SDA so that the SDA works near the critical state. Finally, discussions and suggestions for the design of SDA are presented in this paper.
Keywords :
Actuators; Analytical models; Capacitive sensors; Deformable models; Electrostatics; Employee welfare; Industrial engineering; Insulation; Insulators; Low voltage;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509027