DocumentCode
2017290
Title
A Tunable RF MEMS Inductor
Author
Zine-El-Abidine, I. ; Okoniewski, M. ; McRory, J.G.
Author_Institution
University of Calgary and TRLabs
fYear
2004
fDate
25-27 Aug. 2004
Firstpage
636
Lastpage
638
Abstract
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords
MEMS; inductor; radio frequency; tunable; Inductors; Micromechanical devices; Radiofrequency microelectromechanical systems; MEMS; inductor; radio frequency; tunable;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7695-2189-4
Type
conf
DOI
10.1109/ICMENS.2004.1509028
Filename
1509028
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