Title :
Scanning infrared microscope
Author :
Mzhelskiy, Ivan V. ; Polovinkin, Vladimir G.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fDate :
June 30 2010-July 4 2010
Abstract :
Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
Keywords :
optical microscopes; photodetectors; scanning probe microscopy; photo detector; scanning infrared microscope; Lead; Seminars; Infrared; SIRM; microscope;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-6626-9
DOI :
10.1109/EDM.2010.5568758