Title :
Microfiltration membrane sieve with silicon micromachining for industrial and biomedical applications
Author :
Van Rijn, Cees J M ; Elwenspoek, Miko C.
fDate :
29 Jan-2 Feb 1995
Keywords :
Biomembranes; Ceramics; Chemical vapor deposition; Etching; Filters; Lacquers; Microfiltration; Micromachining; Micromechanical devices; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472549
