Microfiltration membrane sieve with silicon micromachining for industrial and biomedical applications

Author

Van Rijn, Cees J M ; Elwenspoek, Miko C.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

Keywords

Biomembranes; Ceramics; Chemical vapor deposition; Etching; Filters; Lacquers; Microfiltration; Micromachining; Micromechanical devices; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472549

Filename

472549

Link To Document