Cathode boundary layer discharge: flat panel DC excimer sources

Summary form only given, as follows. We present a high-pressure discharge in an extended electrode configuration, which also can be used as an excimer source. Two plane parallel electrodes are separated by a dielectric layer with a thickness of 250 micrometers. While the cathode is a plane molybdenum foil, the anode and the dielectric have a concentric, circular opening with a diameter in the range of 0.75 to 3.5 mm. The glow discharge is restricted to cathode fall and negative glow, with the negative glow carrying the current radially to the circular anode. Optical and electrical measurements of such a cathode boundary layer discharge in xenon and argon have been performed.