مرکز منطقه ای اطلاع رساني علوم و فناوري - Section II: Practical problems of designing and technology of micro- and nanostructures

DocumentCode :

2017823

Title :

Section II: Practical problems of designing and technology of micro- and nanostructures

fYear :

2010

fDate :

June 30 2010-July 4 2010

Firstpage :

114

Lastpage :

114

Abstract :

Start of the above-titled section of the conference proceedings record.

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on

Conference_Location :

Novosibirsk

Print_ISBN :

978-1-4244-6626-9

Type :

conf

DOI :

10.1109/EDM.2010.5568782

Filename :

5568782

Link To Document :