DocumentCode
2017873
Title
Micromachined integrated optics for free-space interconnections
Author
Lin, L.Y. ; Lee, S.S. ; Wu, M.C. ; Pister, K.S.J.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
77
Keywords
Gratings; Integrated optics; Lenses; Mirrors; Optical device fabrication; Optical devices; Optical interconnections; Optical signal processing; Packaging; Sprites (computer);
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472550
Filename
472550
Link To Document