A Near-Infrared, Continuous Wavelength, In-Lens Spectroscopic Photon Emission Microscope System

Author

Tan, Siew-Chong ; Toh, K. ; Jch Phang ; Dsh Chan ; Cm Chua ; Koh, L.

Author_Institution

Nat. Univ. of Singapore, Singapore

fYear

2007

fDate

11-13 July 2007

Abstract

A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 mum to 1.6 mum about the optical axis. The system has been used to perform frontside and backside spectroscopy on forward and reverse-biased p-n junctions and saturated nMOSFETs. The difference in the frontside and backside spectra is due to the "silicon filter effect" for the backside spectra and the optical effects of the dielectrics for the frontside spectra.

Keywords

optical dispersion; optical microscopes; optical prisms; backside spectroscopy; dispersive element; forward-biased p-n junctions; frontside spectroscopy; in-lens spectroscopic photon emission microscope; nMOSFET; near-infrared continuous wavelength microscope; optical axis; reverse-biased p-n junctions; silicon filter effect; three-element prism; Dispersion; MOSFETs; Microscopy; Optical design; Optical filters; Optical saturation; P-n junctions; Silicon; Spectroscopy; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the

Conference_Location

Bangalore

Print_ISBN

978-1-4244-1014-9

Type

conf

DOI

10.1109/IPFA.2007.4378092

Filename

4378092