• DocumentCode
    2018038
  • Title

    Electroless plating alloy thin-film embedded resistor materials

  • Author

    Su, Xingsong ; Lai, Lifei ; Li, Chang ; Liu, Wenjun ; Fu, Xian-Zhu ; Sun, Rong ; Wong, C.P.

  • Author_Institution
    Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, 518055, China
  • fYear
    2015
  • fDate
    11-14 Aug. 2015
  • Firstpage
    240
  • Lastpage
    243
  • Abstract
    Ni-P alloy thin films are prepared by electroless plating as embedded thin-film resistor (ETFR) materials. The micro-structure, electrical, thermal, mechanical, and corrosion-resistant properties of Ni-P alloy thin films are investigated to optimize the electroless plating conditions. When the phosphorus content was greater than 9 %, Ni-P alloy thin films are amorphous. Ni-P alloy thin films´ sheet resistance, corrosion resistance and hardness increase with the increase of P content.
  • Keywords
    Assembly; Impedance; Metals; Packaging; Resistance; Ni alloy; corrosion resistance; electroless plating; thin film embedded resistor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology (ICEPT), 2015 16th International Conference on
  • Conference_Location
    Changsha, China
  • Type

    conf

  • DOI
    10.1109/ICEPT.2015.7236584
  • Filename
    7236584