DocumentCode :
2018073
Title :
Application Of Heterodyne Interferometry To Scanning Coherent Optical Microscopy
Author :
Cho, Kyuman ; Mazzoni, David L. ; Davis, Christopher C.
Author_Institution :
University of Maryland
fYear :
1992
fDate :
16-19 Nov 1992
Firstpage :
327
Lastpage :
328
Keywords :
Focusing; Frequency; Image resolution; Optical interferometry; Optical microscopy; Optical mixing; Probes; Rough surfaces; Scanning electron microscopy; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693974
Filename :
693974
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2018073
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